Reactive ion beam etching of aluminum indium antimonide, gallium indium antimonide heterostructures in electron cyclotron resonance methane/hydrogen/nitrogen/silicon tetrachloride discharges at room temperature

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 1995

ISSN: 0003-6951,1077-3118

DOI: 10.1063/1.115223